APC Butterfly Valve - ModBUS (CF / IF / ISO type)

Htc APC butterfly vacuum valve types can used as downstream pressure control and isolation valve.  There are 3 types can be chosen from, CF, IF, ISO type. Application in SEMI - Semiconductor, FPD - Flat Panel Display, CVD - Chemical Vapor Deposition, Solar. Contact us for more!

Product Description

Htc APC butterfly valve types can used as downstream pressure control and isolation valve.  There are 3 types can be chosen from, CF, IF, ISO type. Application in SEMI - Semiconductor, FPD - Flat Panel Display, CVD - Chemical Vapor Deposition, Solar.

❙ Features 

• Integrated pressure controller
• Accurate pressure control
• Compact isolation
• Short response time
• Friendly user interface

❙ ModBUS controller 

• Sensor supply : 24V DC or ±15V DC
• Backup power : Yes
• Sensor input
  •  - Q'ty of sensors : 2 pcs
  •  - Vacuum gauge : Linear / Exponent
  •  - Signal voltage : 0-10V DC linear with pressure
  •  - Inupt resistance : Ri=47 kΩ
  •  - Resolution : 2.3 mV
  •  - Sample rate : 1ms
• Control accuracy : 0.1% of maximum sensor range
• Analog/Digital Easy Control
• Position resolution : 8000(step 0-90o rotation)
• Ambient temperature : 70°C max(Controller part-24HR)
• The valve can be controlled by a host(local) via RS232 ; For initial adjustment.

❙ APC software functions 

• Set control tuning parameter：PID GAIN
• Pressure and position control mode
• Schedule test Mode=> 1 cycle schedule
• Set valve open/close speed
• Report APC HW/SW version, serial and model number
• Report valve cycles and run hours
• Set tolerance scope of pressure
• Cycles life and pressure control record
• Controller parameter upload and download
• Power failure protection
• Learning function

Find a vacuum valves manufacturer that is professional and customized for your drawing in here, contact us for more information!